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In an embodiment where the precursor is a liquid, the precursor can, for example, be introduced by direct injection into the reaction zone and is then subsequently vaporized by the heated parts. If desired, the liquid precursor can be introduced in the form of an atomized spray into the reaction zone and vaporized by the heated parts. Preferably, the liquid precursor is vaporized by heat from the heated substrate while the liquid is still in the transport space. In some embodiments, a saturated vapor of the precursor can be injected into the reaction zone from an external vaporizer, such as a falling film evaporator, a wiped film evaporator, or a heated boiler.

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